In the HTXRD also, the alumina was found to be amorphous in agreement with our TEM results and the literature [20, 24, 25]. The multilayers do not have any secondary phases

at the interfaces. Figure 3 Bright-field image showing cross-sectional view of the as-deposited Al 2 O 3 /ZrO 2 multilayers (5:10 nm). Inset shows the SAED pattern from the multilayers. The XTEM was also performed to determine the this website structure of the annealed 5:10-nm Al2O3/ZrO2 multilayer film with 40 bilayers. Figure  4 shows a cross-sectional view of the annealed Al2O3/ZrO2 (5:10 nm) film. The layer boundaries are not distinctly separated. It might be due to inter-diffusion between the layers. The distinction between Al2O3 and ZrO2 is less clear in the regions where the zirconia has amorphized. While most part of the of the multilayer structures are still evident, the zirconia layers are seen to have become discontinuous, with regions of an amorphous phase separating regions of crystalline zirconia [26, 27]. The inset shows

the SAED pattern of this film. The strong and weak intensity spots are corresponding to Si and ZrO2, respectively. No indications of learn more a crystalline alumina layer have been observed. The crystalline regions of the zirconia layers are completely transformed to a tetragonal structure (JCPDS #50–1089) and in agreement with the HTXRD results. The zirconia crystallite sizes are found to be smaller at higher annealing temperature compared with moderate annealing temperature [18]. In addition to the formation of tetragonal zirconia, some portion of the zirconia was transformed into an amorphous structure [26, 27]. This is why HTXRD did not show any significant growth in the crystallite size of t-ZrO2 at higher annealing temperatures. Figure  5 shows the high-resolution lattice image of the 5:10-nm Cobimetinib multilayer film annealed at 1,273 K. It shows the marked regions A, B, C, D, E, F, G, and H in the zirconia

layer; d-spacings were calculated, and corresponding Miller indices obtained from these regions are (101), (110), and (103), as shown in the HTXRD pattern. Further characterization by analytical TEM is required to investigate the nature of microchemical changes that have taken place during the high-temperature annealing. This would provide a complete explanation of the observed microstructural features. Figure 4 Bright-field image showing cross-sectional view of Al 2 O 3 /ZrO 2 (5:10 nm) multilayer film annealed at 1,273 K in HTXRD. Inset shows the SAED pattern. Figure 5 High-resolution lattice image of Al 2 O 3 /ZrO 2 (5:10 nm) multilayer film annealed at 1,273 K in HTXRD. Atomic force microscopy was performed to obtain a three-dimensional image of the surface morphology of multilayer films before and after annealing. The typical scan area is 1 × 1 μm2. Figure  6 shows the surface morphology of the as-deposited and annealed films. These images allow for an accurate analysis of the sample surface and quantification of surface roughness.